Compact Plasma and Focused Ion Beams.pdf

Compact Plasma and Focused Ion Beams PDF

Sudeep Bhattacharjee

Recent research has brought the application of microwaves from the classical fields of heating, communication, and generation of plasma discharges into the generation of compact plasmas that can be used for applications such as FIB and small plasma thrusters. However, these new applications bring with them a new set of challenges. With coverage ranging from the basics to new and emerging applications, Compact Plasma and Focused Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff dimension can be generated and utilized for providing focused ion beams of various elements. Starting with the fundamentals of the cutoff problem for wave propagation in waveguides and plasma diagnostics, the author goes on to explain in detail the plasma production by microwaves in a compact geometry and narrow tubes. He then thoroughly discusses wave interaction with bounded plasmas and provides a deeper understanding of the physics. The book concludes with an up-to-date account of recent research on pulsed microwaves and the application of compact microwave plasmas for multi-element FIB.It provides a consolidated and unified description of the emerging areas in plasma science and technology utilizing wave-based plasma sources based on the authors own work and experience. The book will be useful not only to established researchers in this area but will also serve as an excellent introduction to those interested in applying these ideas to various current and new applications.

Nov 11, 2019 ... 11, 2019 (GLOBE NEWSWIRE) -- The "Focused Ion Beam Market by Ion Source ( Ga+ Liquid Metal, Plasma), Application (Failure Analysis,... ... by end-users as it offers small size ion beam (5nm), requires small emission area, ... 3, focused ion-beam (FIB) process modeling and simulation for nanohole fabrication, ... a cell (6), the modulation of the passage of ions and other small molecules through cell ... Nanofiltration of Plasma-Derived Biopharmaceutical Products. ,”.

1466557885 ISBN
Englisch SPRACHE
Compact Plasma and Focused Ion Beams.pdf


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Aktuelle Bewertungen

Sofia Voigt

Sudeep BHATTACHARJEE | Ph. D | Indian …

Matteo Müller

Physics - IIT Kanpur His current research includes development of a compact microwave plasma based multi-element focused ion beam system, nanoscale physics using focused ion beams and interaction of electromagnetic waves with plasmas. More details can be found on his personal homepage. WEB

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A compact broadband ion beam focusing device based on ... Focusing of laser-generated ion beams by a plasma cylinder: Similarity theory and the thick lens formula Phys. Plasmas 13, 063103 (2006); 10.1063/1.2205191 Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications J. Vac. Sci. Technol. B 16, 3370 (1998); 10.1116/1.590461

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However, while the SEM uses a focused beam of electrons to image the sample in the chamber, a FIB setup uses a focused beam of ions instead. FIB can also be incorporated in a system with both electron and ion beam columns, allowing the same feature to be investigated using either of the beams. Sudeep Bhattacharjee - IITK